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Electron Beam Lithography

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Available System

  • Vistec EBPG 5000PlusES

Contact

Nanotechnology Group

Paul Scherrer Institut
Forschungsstrasse 111
5232 Villigen PSI
Switzerland

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Dr. Vitaliy Guzenko

E-Mail: vitaliy.guzenko@psi.ch

T: +41 56 310 54 36

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