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Nanoimprint Lithography Facilities

hex03.jpg
  • Jenoptic HEX 03

Contact

Laboratory for Micro-
and Nanotechnology

Paul Scherrer Institut
5232 Villigen PSI
Switzerland

 

Dr. Helmut Schift
E-mail: helmut.schift@psi.ch
Telephone: +41 56 310 2839

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